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Our History

2001-2002

Carried out a deep modernization of MBE systems,
produced in the USSR.

2003-2004

  Developed a MBE System EPN3 intended for the growth of the III-nitrides

2005-2006 


Successfully completed test of a new series MBE systems experimental prototype (providing receiving nanoheterostructures based of compounds A 3 B 5 and Si-Ge), which gave the beginning of serial production MBE STE series systems

2006-2007

Produced the first modelsof wafer processing equipment: plasma-chemical etching, electron-beam deposition, thermal annealing

2007-2008

  Produced a new MBE STE3532 System, configured for the growth of A 3 B 5 materials

2008-2009

Designed and produced the first two-reactor system STE3526 configured for growth of hybrid nanoheterostructures A 3 B 5 /A 2 B 6   with consideration to latest achievements in these systems

2009-2010

Infrastructure project with the participation of SemiTEq JSC approved by OJSC "RUSNANO". A contract with one of India's leading laboratories MO - DRDO in Solid State Physics Laboratory (SSPL, New Delhi) for the supply STE3N2 System with plasma source.

2011

  New complex product - Nanolaboratory was developed under the state contract. Put into operation Application Lab.