In 2008 SemiTEq has become one of the main integrators of equipment in the Southern Federal University. There have been successfully installed 4 systems. Delivery of the molecular beam epitaxy module was carried out as part of the NANOFAB 100 by "NT-MDT."
STE35 - MBE System for GaAs growth
STE ICPe68 - PVD System
STE ICPd81 - PECVD System
STE RTA70H - Rapid thermal annealing System