STE3526 Two-reactor MBE cluster tool system for growth of hybrid heterostructures А3В5/А2В6
Two-reactor STE3526 MBE system is specially designed for growth of hybrid heterostructures А3В5/А2В6 and other applications taking into account all specific of MBE growth of these material systems.
STE3526 is intended for R&D activities and pilot production of epi-wafers.
Specific feature of the system is providing of ultra-pure UHV substrate transport from А3В5-reactor to А2В6 one avoiding uncontrolled contaminations of the growth interface.
Growth reactors based on STE35 platform are equipped by valve cracker cells for V and VI Group elements as well as all necessary in-situ analytic tools.
• “lab-to-fab” concept, allowing activities from fundamental research to pilot production of heterostructures