STE3526 Two-reactor MBE cluster tool system for growth of hybrid heterostructures А3В5/А2В6 Two-reactor STE3526 MBE system is specially designed for growth of hybrid heterostructures А3В5/А2В6 and other applications taking into account all specific of MBE growth of these material systems. STE3526 is intended for R&D activities and pilot production of epi-wafers. Specific feature of the system is providing of ultra-pure UHV substrate transport from А3В5-reactor to А2В6 one avoiding uncontrolled contaminations of the growth interface. Growth reactors based on STE35 platform are equipped by valve cracker cells for V and VI Group elements as well as all necessary in-situ analytic tools. • “lab-to-fab” concept, allowing activities from fundamental research to pilot production of heterostructures
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