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RTA & RTP Systems

Rapid Thermal Processing Systems (RTP Systems) refers to a semiconductor manufacturing process which heats wafers to high temperatures (up to 1,200 °C or greater).
Rapid thermal annealling (RTA) is a subset of Rapid Thermal Processing. It is a process used in semiconductor device fabrication which consists of heating a single wafer at a time in order to affect its electrical properties. Unique heat treatments are designed for different effects. Wafers can be heated in order to activate dopants, change film-to-film or film-to-wafer substrate interfaces, densify deposited films, change states of grown films, repair damage from ion implantation, move dopants or drive dopants from one film into another or from a film into the wafer substrate.