SemiTEq PVD systems allows: 

• e-beam evaporation of metals, dielectrics and semiconductor materials in HV and UHV;
•  magnetron sputtering and thermal resistive evaporation of a wide range of multilayer coatings, incl.  metals, resistive alloys, dielectrics and ITO films.

Extensive technologies recipes library makes possible a quick start of pilot and serial production.