Magnetron and resistive thermal evaporation systems Magnetron sputtering and resistive thermal evaporation systems are intended to obtain a wide range of multilayer coatings, such as: - metals Cu, Cr, Ni, Ag, Al, Ti, W, V, Ta, etc.; - resistive alloys; - dielectrics SiO2, SiNx, TiN, LiNbO3, Ta2O3, etc.; - ITO films, etc. Flexible configuration and using of different sputtering sources allows to realize a projects of various types. |
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