Close

Your question

Your name*:Please introduce yourself.

Organization*:

Phone:How to contact you

E-mail*:

Your Message*:Your questions and comments.

Страница:



language
HomeProductsPVD SystemsVersatile PVD platform

STE D700M Magnetron sputtering system

STE D700M system based on the versatile PVD platform STE D700 and intended for magnetron sputtering wide range of multilayer coatings

  • System capacity:
  • Basic configuration
  • Key advantages:

Standard configuration:

  • 42×Ø2”
  • 20×Ø3”
  • 12×Ø100mm
  • 6×Ø150mm

Configuration with load-lock chamber:*

  • 6×Ø2”
  • 3×Ø3”
  • 1×Ø100mm
  • 1×Ø150mm
  • 1×Ø200mm

_______________________________________

*optional


EVAPORATION CHAMBER

  • Sputtering system configuration depends on  end applications
  • Carousel or confocal version
  • Direct and indirect target cooling
  • Ion beam cleaning
  • D-shape design
  • Water-cooling system
  • Dome-shaped wafer holder
  • Flat carousel wafer holder in configuration with load-lock chamber*

VACUUM SYSTEM

  • Pumping system depends on a platform application (turbomolecular, cryogenic pumps, scroll forepump)

PROCESS CONTROL

  • Process automatization
  • Programming and storage of technological recipes

_____________________

*optional

  • Adjustable evaporator-to-wafer distance
  • Wafer holder rotation up to 20rpm
  • Wafer heating
  • Ion beam source
  • Protective screen system 

_____________________

*optional

Copyright 2012—2024 SemiTEq JSC

Phone: +7 (812) 601 06 68, +7 (812) 601 06 05. E-mail: sales@semiteq.ru
27 Engels av., lit. AD, office 205, Svetlanovskoye Municipal District, St.-Petersburg, 194156 Russia